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能动学术论坛 第96期

发布日期:2017-07-29 点击数:

bat365中文官方网站能源与动力工程学院

能动学术论坛

(第96期)

主题

Improving Sustainability of Atomic Layer   Deposition: A Hierarchical Systems Approach

主讲人

Tien-Chien Jen教授(南非约翰内斯堡大学)

时间

20170729日(周六)上午10:00—11:30

地点

千佛山校区东配楼二层东会议室(212)

嘉宾及内容简介

Tien-Chien Jen,   Professor, ASME Fellow

Head, Department of   Mechanical Engineering Science

Director, UJ-Nanjing   Tech Joint Research Center

Director, UJ   Manufacturing Research Center

University of   Johannesburg, South Africa

This presentation will be   focus on the development   of mathematical models and tools for reducing the environmental impact and   economic costs of ALD nano-manufacturing processes. A systematic   investigation have been performed and there are three major research objectives   as stated follows:

Objective 1: Mathematical modeling and   experimental investigations of ALD process emissions

 

Objective 2: Thermodynamic flows and energy   modeling of ALD nano-manufacturing system

 

Objective 3: Sustainable scale-up of ALD nanotechnology   for industrial productions

 

This   research work was supported by National Science Foundation (NSF) of USA with   the funding amount of $475,902.


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